Purpose-built autonomous mobile robot for semiconductor fab logistics. ATS 20 with 20-slot FOUP/FOSB capacity, ±10mm positioning precision, ≤0.3G vibration control, and 10h+ battery life for cleanroom wafer carrier transport.
The YOUIBOT ATS-Series is a purpose-built autonomous mobile robot designed specifically for semiconductor fabrication facility logistics. The ATS 20 flagship model transports up to 20 FOUP (Front Opening Unified Pod) or FOSB (Front Opening Shipping Box) wafer carriers with ultra-low vibration characteristics critical for wafer integrity. Based on YOUIBOT official specifications, the system combines dual LiDAR, 3D cameras, and RFID tracking for precise cleanroom material flow automation.
±10mm positioning accuracy with ≤0.3G vibration control ensures wafer carrier integrity during autonomous transport through cleanroom environments.
ATS 20 model stores and transports 20 FOUP/FOSB carriers simultaneously with RFID real-time tracking of each lot for complete traceability.
Dual LiDAR, 3D camera, pit sensors, and 360° bumper system provide comprehensive safety protection in human-shared cleanroom corridors.
Semiconductor Cleanroom AMR
Engineered for demanding industrial automation applications
Vibration control ≤0.3G on flat surfaces protects sensitive wafer carriers from particle generation and mechanical shock during transport.
Integrated RFID sensors provide real-time tracking of every FOUP/FOSB carrier, enabling complete lot traceability and automated inventory management.
150Ah battery delivers 10h+ runtime under full load, supporting multi-shift cleanroom operations without frequent charging interruptions.
Two independent LiDAR sensors combined with 3D cameras enable reliable SLAM navigation in long, narrow cleanroom corridor environments.
ATS 12-FFU model with integrated Fan Filter Unit operates in ISO-class cleanrooms, maintaining particulate contamination control standards.
Direct connectivity to fab Manufacturing Execution Systems for automated lot dispatch, tool-to-tool transport, and stocker management integration.
Complete technical parameters based on manufacturer specifications
| Parameter | ATS 20 | ATS 12-FFU |
|---|---|---|
| Storage Capacity | 20 FOUP/FOSB slots | 12 FOUP slots |
| Robot Dimensions (LxWxH) | 1940 x 528 x 1765 mm | 1384 x 500 x 1420 mm |
| Payload / Capacity | 20 carriers | 12 carriers |
| Navigation | Laser SLAM Fusion | Laser SLAM Fusion |
| Positioning Accuracy | ±10 mm | ±10 mm |
| Battery Runtime | 10h+ (full load) | 4h+ |
| Battery Capacity | 150 Ah | Standard |
| Vibration Control | ≤0.3G (flat surface) | ≤0.3G |
| Safety Sensors | Dual LiDAR + 3D Camera + Pit Sensor + 360° Bumper | Dual LiDAR + 3D Camera + 360° Bumper |
| Carrier Compatibility | FOUP, FOSB, wafer boxes | FOUP |
| Cleanroom Class | Standard cleanroom | FFU-equipped cleanroom |
| Tracking | RFID real-time monitoring | RFID monitoring |
| Fleet Management | YOUIFLEET | YOUIFLEET |
| Application | Fab lot box transport | Cleanroom-grade lot transport |
Specifications sourced from official manufacturer documentation. Actual parameters may vary by configuration. Contact BRIDZA for the latest data sheets.
Proven deployments across multiple industrial sectors
FOUP/FOSB transport between process tools, stockers, and metrology stations in 300mm wafer fabrication facilities.
Glass substrate and panel carrier transport in LCD, OLED, and micro-LED display production cleanrooms.
Component carrier and tray transport in SMT lines and electronics assembly cleanroom environments.
Sterile material transport in pharmaceutical cleanrooms requiring controlled particulate environments.
Authorized distributor with comprehensive global support infrastructure
Factory-backed warranty and genuine spare parts supply chain.
Complete solution including site survey, simulation, deployment, and training.
Remote diagnostics and on-site service response for critical operations.
AI-powered scheduling platform managing 1000+ heterogeneous robots.
Get a customized proposal for semiconductor AMR deployment. Our team provides specifications, cleanroom compatibility assessment, and integration planning for YOUIBOT ATS-Series systems.